盾源聚芯SiFusion产品喷淋头Showerhead
The showerhead is used in the dry etching machine as the upper electrode and etching gas channel. It's the critical consumable components in the IC manufacturing.
Technical Superiority

1. High-precision no-damage customized showerhead

2. High purity of mono-crystalline silicon materials

3. High precision of products

4. High control on the metal contamination

5. Curved surface